半导体湿制程工艺设备是指在晶圆制造及封装测试过程中，以化学液体或去离子水为主要介质，对晶圆表面进行清洗、刻蚀、显影或剥离处理的专用设备，具有工艺条件温和、设备成本较低及对晶圆损伤较小等特点，是半导体制造过程中不可或缺的重要基础设备。按核心工艺用途划分，主要包括湿法清洗设备、湿法刻蚀设备、湿法显影设备及湿法剥离设备，其中湿法清洗设备与湿法刻蚀设备使用频率最高、市场规模最大，是湿制程设备体系中的核心品类。
现阶段该设备市场的增长主要受三重因素驱动：半导体制程持续向先进节点演进，器件结构复杂化与特征尺寸持续缩小，对湿法设备的精度控制、洁净水平及长期稳定性提出更高要求，直接拉动高端设备需求；国家半导体产业链自主可控政策加速国产替代进程，国内湿法设备在成熟制程及先进清洗技术领域已实现实质性突破；AI、新能源汽车等下游领域爆发式增长推动晶圆厂大规模建设与产能扩张，进一步刺激设备采购需求。
中国半导体湿法清洗设备市场规模从2020年的93.5亿元增长至2024年的228.2亿元，复合年增长率高达25.0%；预计2025年至2029年市场规模将从259.5亿元增长至408.0亿元，复合年增长率达12.0%。中国半导体湿法刻蚀设备市场规模从2020年的29.1亿元增长至2024年的68.0亿元，复合年增长率为23.6%；预计2025年至2029年市场规模将从76.5亿元增长至111.4亿元，复合年增长率达9.9%。
Semiconductor wet process equipment refers to specialized systems that use chemical liquids or deionized water as the primary medium to perform cleaning, etching, developing, or stripping treatments on wafer surfaces during wafer fabrication and packaging/testing processes. Characterized by mild process conditions, lower equipment costs, and minimal wafer damage, these systems are indispensable in semiconductor manufacturing. By core process application, they include wet cleaning, wet etching, wet developing, and wet stripping equipment, with wet cleaning and wet etching equipment being the highest-frequency and largest-market categories.
Market growth is driven by three key forces: continued semiconductor process advancement toward smaller nodes, which demands higher precision, cleanliness, and long-term stability from wet process equipment; national policies accelerating domestic substitution, with Chinese wet process equipment achieving substantial breakthroughs in mature nodes and advanced cleaning technologies; and explosive downstream demand from AI and new energy vehicles driving large-scale wafer fab construction and capacity expansion.
China's semiconductor wet cleaning equipment market grew from RMB 9.35 billion in 2020 to RMB 22.82 billion in 2024, at a CAGR of 25.0%. From 2025 to 2029, the market is projected to grow from RMB 25.95 billion to RMB 40.80 billion, at a CAGR of 12.0%. China's semiconductor wet etching equipment market grew from RMB 2.91 billion in 2020 to RMB 6.80 billion in 2024, at a CAGR of 23.6%. From 2025 to 2029, the market is projected to grow from RMB 7.65 billion to RMB 11.14 billion, at a CAGR of 9.9%.
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