The semiconductor liquid chemical supply system is a critical supporting facility used for the safe storage, precise metering, and stable supply of chemical media to process equipment. It completes the transportation and management of various process liquids from storage areas to production equipment through a pipeline network and control modules. Currently, it is widely applied in fields such as wafer manufacturing, display panels, photovoltaic cells, and power semiconductors. According to the type of process media being treated, the supply system can be mainly divided into two categories: high-purity liquid chemical supply systems and abrasive supply systems.
At present, the development of the semiconductor liquid chemical supply system is driven by multiple factors: the global transfer of semiconductor production capacity to the Chinese mainland and the continuous expansion of local wafer factories directly drive the demand for equipment procurement. The state's policy support for the autonomous control of the semiconductor industry chain accelerates the process of domestic substitution. The explosive growth in downstream fields such as AI and new energy vehicles drives the expansion of chip manufacturing capacity. At the same time, the evolution of advanced processes towards 3nm and below poses higher technical requirements for chemical supply systems, including ppt-level impurity control and nanoscale particle precision. Overall, the deepening implementation of domestic substitution policies, the technological iteration of downstream high-end manufacturing industries, and the continuous expansion of wafer factory capacity are the core driving forces behind the continuous growth of the market scale of China's semiconductor liquid chemical supply system.
The total market scale of China's semiconductor liquid chemical supply system increased from 1.96 billion yuan in 2020 to 12.51 billion yuan in 2029, achieving an over six-fold growth. Among them, the market scale of high-purity liquid chemical supply systems increased from 1.57 billion yuan in 2020 to 4.51 billion yuan in 2024, with a compound annual growth rate of 30.2%. It is expected to reach 9.38 billion yuan in 2029; the market scale of grinding fluid supply systems increased from 3.9 billion yuan in 2020 to 1.04 billion yuan in 2024, with a compound annual growth rate of 27.6%. It is expected to reach 3.13 billion yuan in 2029, both sub-markets maintaining strong growth momentum.
Semiconductor liquid chemical supply systems are critical supporting facilities designed for the safe storage, precise metering, and stable delivery of chemical media to process equipment. Through pipeline networks and control modules, they manage the transport of various process liquids from storage areas to production equipment. These systems are widely deployed across wafer fabrication, display panel, photovoltaic cell, and power semiconductor applications. By process media type, supply systems are primarily classified into high-purity liquid chemical supply systems and slurry supply systems.
Currently, the development of semiconductor liquid chemical supply systems is driven by multiple forces: the global shift of semiconductor capacity to mainland China and continuous domestic wafer fab expansion are directly fueling equipment procurement demand; national policies supporting semiconductor supply chain self-sufficiency are accelerating domestic substitution; explosive growth in downstream sectors such as AI and new energy vehicles is driving chip manufacturing capacity expansion; and the advancement of leading-edge processes to 3nm and below is imposing stricter requirements for ppt-level impurity control and nanometer-scale particle precision. Overall, the deepening implementation of domestic substitution policies, technology iteration demands from downstream high-end manufacturing, and sustained wafer fab capacity expansion serve as the core drivers for the continued growth of China's semiconductor liquid chemical supply systems market.
The total market size of China's semiconductor liquid chemical supply systems grew from RMB 19.6 billion in 2020 to a projected RMB 125.1 billion by 2029, an increase of more than sixfold. Among them, the high-purity liquid chemical supply systems segment grew from RMB 15.7 billion in 2020 to RMB 45.1 billion in 2024, at a compound annual growth rate (CAGR) of 30.2%, and is projected to reach RMB 93.8 billion by 2029. The slurry supply systems segment grew from RMB 3.9 million in 2020 to RMB 10.4 billion in 2024, at a CAGR of 27.6%, and is projected to reach RMB 31.3 billion by 2029, with both sub-segments maintaining robust growth momentum.
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