半导体液态化学品供应系统是用于对化学介质进行安全存储、精确计量并稳定供给至工艺设备端的关键配套设施，通过管路网络及控制模块完成各类制程用液由储存区域至生产设备的输送与管理，目前已广泛应用于晶圆制造、显示面板、光伏电池及功率半导体等领域。按照处理工艺介质类型划分，供应系统主要可分为高洁净度液态化学品供应系统与研磨液供应系统两大类。
现阶段半导体液态化学品供应系统的发展正受到多重因素驱动：全球半导体产能向中国大陆转移与本土晶圆厂持续扩产直接拉动设备采购需求，国家对半导体产业链自主可控的政策扶持加速国产替代进程，AI、新能源汽车等下游领域的爆发式增长推动芯片制造产能扩张，同时先进制程向3nm及以下演进对化学品供应系统提出ppt级杂质控制与纳米级微粒精度的更高技术要求。整体来说，国产替代政策深化落地、下游高端制造业技术迭代倒逼以及晶圆厂产能持续扩张是推动中国半导体液态化学品供应系统市场规模持续增长的核心驱动力。
中国半导体液态化学品供应系统市场总规模从2020年的19.6亿元增长至2029年的125.1亿元，实现超六倍增长。其中，高洁净度液态化学品供应系统市场规模由2020年的15.7亿元增长至2024年的45.1亿元，复合年增长率达30.2%，预计2029年将达到93.8亿元；研磨液供应系统市场规模由2020年的3.9亿元增长至2024年的10.4亿元，复合年增长率为27.6%，预计2029年将达到31.3亿元，两大细分市场均保持强劲增长态势。
Semiconductor liquid chemical supply systems are critical supporting facilities designed for the safe storage, precise metering, and stable delivery of chemical media to process equipment. Through pipeline networks and control modules, they manage the transport of various process liquids from storage areas to production equipment. These systems are widely deployed across wafer fabrication, display panel, photovoltaic cell, and power semiconductor applications. By process media type, supply systems are primarily classified into high-purity liquid chemical supply systems and slurry supply systems.
Currently, the development of semiconductor liquid chemical supply systems is driven by multiple forces: the global shift of semiconductor capacity to mainland China and continued domestic wafer fab expansion are directly fueling equipment procurement demand; national policies supporting semiconductor supply chain self-sufficiency are accelerating domestic substitution; explosive growth in downstream sectors such as AI and new energy vehicles is driving chip manufacturing capacity expansion; and the advancement of leading-edge processes to 3nm and below is imposing stricter requirements for ppt-level impurity control and nanometer-scale particle precision. Overall, the deepening implementation of domestic substitution policies, technology iteration demands from downstream high-end manufacturing, and sustained wafer fab capacity expansion serve as the core drivers for the continued growth of China's semiconductor liquid chemical supply systems market.
The total market size of China's semiconductor liquid chemical supply systems grew from RMB 1.96 billion in 2020 to a projected RMB 12.51 billion by 2029, achieving more than a sixfold increase. Within this, the high-purity liquid chemical supply systems segment grew from RMB 1.57 billion in 2020 to RMB 4.51 billion in 2024, at a CAGR of 30.2%, and is projected to reach RMB 9.38 billion by 2029. The slurry supply systems segment grew from RMB 390 million in 2020 to RMB 1.04 billion in 2024, at a CAGR of 27.6%, and is projected to reach RMB 3.13 billion by 2029, with both sub-segments maintaining robust growth momentum.
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