离子束设备的上游主要包括原材料及核心零部件，其中原材料包括金属材料以及特殊功能材料，核心零部件包括真空系统组件、离子源核心部件如腔体和电极、电源及控制系统、辅助部件等。中游涵盖离子束设备的研发设计、整机组装、测试校对及系统集成，其中主要制造环节包括离子源装配与调试、真空系统集成、电源与控制系统联调、整机性能测试等，产品按功能主要分为离子束塑形设备以及离子束沉积设备。下游应用领域主要包括半导体领域和光电领域，其他领域包括航空航天、生物医学、新能源等。
中国离子束设备市场规模从2023年的2.2亿元增长至2025年的7.6亿元，期间年复合增长率为86.8%。未来，随着半导体先进制程和特色工艺产线持续扩建，离子束设备在掺杂、调阻等关键环节的渗透率进一步提升。
The upstream sector of ion beam equipment mainly includes raw materials and core components. Raw materials consist of metallic materials and special functional materials, while core components include vacuum system components, key parts of the ion source such as chambers and electrodes, power supply and control systems, and auxiliary components. The midstream sector covers the R&D and design, complete machine assembly, testing and calibration, and system integration of ion beam equipment. The main manufacturing processes include ion source assembly and debugging, vacuum system integration, power supply and control system joint debugging, and overall performance testing. By function, the products are primarily categorized into ion beam shaping equipment and ion beam deposition equipment. The downstream application fields mainly include the semiconductor industry and optoelectronics, with other areas such as aerospace, biomedicine, and new energy.
The market size of China's ion beam equipment grew from RMB 220 million in 2023 to RMB 760 million in 2025, representing a CAGR of 86.8% over this period. In the future, as the construction of advanced semiconductor process nodes and specialty process production lines continues to expand, the penetration rate of ion beam equipment in key processes such as doping and resistance trimming is expected to further increase.
